Semiconductor MES Case Studies

Proven Results in Semiconductor Smart Manufacturing

By integrating equipment connectivity, MES, WMS, and automation, we help semiconductor manufacturers improve quality and production efficiency.

Note: The above figures represent selected NTT DATA semiconductor implementations. Actual results may vary by operational environment and requirements.

Core Integration Capabilities for Semiconductor Smart Manufacturing

Connect equipment data, production traceability, warehousing, and automated material transport to create an integrated semiconductor manufacturing environment.

EAP/IIoT Equipment Connectivity

Automatically collect equipment events, alarms, and process parameters to establish a unified source of equipment data.

WIP & Production Traceability

Track Lot, Wafer, and Carrier data to support split, merge, and rework operations.

Quality Management & SPC

Integrate measurement and inspection data, trigger real-time alerts, and connect nonconformance handling workflows.

Equipment & Alarm Management

Manage equipment maintenance, downtime, and operating status, with support for Port- and Chamber-level management.

Warehouse & ERP Integration

Connect inbound/outbound operations, material issue and return, and automatic backflushing, with real-time updates to ERP for better inventory record accuracy.

AGV Automated Transport Integration

Connect MES dispatching with process-to-process transport to automate material movement across manufacturing operations.

Semiconductor Case Studies

Explore how equipment connectivity, MES, WMS, AGV, and AI are applied across semiconductor materials, optical and semiconductor coating, reclaimed wafers, and wafer foundry operations—and the results they deliver.

Semiconductor Materials | Injection Molding Equipment Connectivity & Process Optimization

A global supplier of materials for the semiconductor and high-tech industries needed real-time visibility into critical process parameters from injection molding equipment to improve process stability and product quality.


  • Connected temperature and pressure sensors to automatically capture molding-cycle and second-by-second process data.
  • Integrated existing analytics for process parameter analysis and machine parameter optimization.

Optical / Semiconductor Coating | Equipment Connectivity, EXC-MES & AGV Integration

An optical and semiconductor coating manufacturer needed to improve equipment utilization, production efficiency, and on-time delivery performance through integrated production management and automated material transport.


  • Improve equipment utilization and production visibility
  • Establish production traceability and KPI management
  • Enable automated process-to-process transport

Reclaimed Wafer | EXC-MES & EXC-WMS Production and Warehouse Integration

A 12-inch reclaimed wafer manufacturer initially implemented MES at its new facility for production management, incoming material management, and EDI reporting, then expanded to quality and warehouse management.


  • Establish Wafer, Lot, and Carrier traceability
  • Enhance equipment-level management and visibility
  • Integrate warehouse operations with ERP to improve inventory record accuracy

Track Wafer, Lot, and Carrier IDs, with equipment management extended to Port and Chamber levels.

Integrate warehouse operations and ERP updates to improve inventory accuracy and reduce accounting errors.

Wafer Foundry | AI-Powered Defect Classification

Wafer defects span multiple categories, making manual classification time-consuming. The manufacturer needed faster and more accurate defect identification to reduce scrap losses and improve production efficiency.


  • Improve wafer defect classification efficiency
  • Increase defect classification accuracy
  • Expand identifiable defect categories while reducing manual classification workload

Automatically classify wafer defects to support faster root-cause identification and corrective actions.

Apply AI models to automate defect classification, reducing manual effort while improving efficiency and accuracy.

Expanded from 8 to 44 categories

Improved from 80% to 85%

10% improvement with AI classification

Semiconductor Industry FAQ

Q1: How is semiconductor equipment connected?


A: EAP/IIoT connects equipment alarms, process parameters, and other data to EXC-MES or visualization dashboards for real-time equipment and process monitoring.

Q2: What production and WIP data can EXC-MES trace?


A: EXC-MES traces Lot, Wafer, and Carrier data and supports split, merge, and rework operations for complete production traceability.

Q3: How does EXC-WMS integrate with ERP?


A: EXC-WMS integrates inbound/outbound, material issue/return, and automatic backflushing with ERP to improve inventory accuracy and reduce discrepancies.

Smart Manufacturing Insights

From IIoT Connectivity to the Smart Factory

Explore how manufacturers can advance step by step from equipment data and MES integration to AI applications.

Read Article →

5 Key Factors for Successful MES Implementation

Learn the key factors for successful MES implementation, from clear objectives and data quality to continuous improvement.

Read Article →

Planning Your Semiconductor Smart Manufacturing Journey?

Across equipment connectivity, production and quality management, smart warehousing, and automated material transport, we design integrated solutions around your existing systems and shop-floor requirements.